Line/Space Analysis

Summary:
The Line/Space application automates standard measurement of top-down CD-SEM images of Line/Space patterns, for a batch of images, for example, from a CD through pitch image set. Images from all major CD-SEM and AFM equipment supplier are supported for standardized, repeatable, accurate image analysis and metrology. SIMAGIS Semi automatically recognizes lines and spaces as well as horizontal/vertical orientation without manual intervention. SIMAGIS Semi filters noise, detects edges, and performs a comprehensive statistical analysis of CD measurements LER and LWR, matching results and standardizing edge detection across CD-SEM equipment types. Simagis Semi reports average Linewidth statistic as well as the widths of each individual line and space on the image. Statistical results include individual/single feature results as well as aggregate/cumulative results, plus histograms.

Image Types Supported:
Top-down CD SEM and AFM images.

Sample Preparation:
Sample preparation and imaging services are available through qualified Service Partners.

Sample Analysis Report:

Analysis Metrics/Outputs:

	Line Width
	LWR <3σ>
	LER Left <3σ>
	LER Right <3σ>
	Space Width
	Pitch Left
	Pitch Right
	Duty Cycle Left
	Duty Cycle Right
	Slope Angle Left
	Slope Angle Right
	Sigma inf <3σ>